基于石墨烯/聚合物自组装悬浮膜气压传感器的制备与性能探究

doi:10.19936/j.cnki.2096-8000.20260328.017

摘要/Abstract

摘要： 本文设计并制备了一种基于还原氧化石墨烯悬浮膜(reduced Graphene Oxide Suspended Film,rGO-SF)的气压传感器,其中rGO-SF基于自组装氧化石墨烯(Graphene Oxide,GO)薄膜从溶液中自发分离,并在经刻蚀膏处理过的SiO₂表面形成的空腔上原位生长制备而成。相较于传统的石墨烯基气压传感器制备工艺,rGO-SF气压传感器的制备无需借助膜转移工艺,极大地简化了制备流程,为大规模生产提供了有利条件。此外,在rGO层间引入改性聚甲基丙烯酸甲酯(Modified Polymethyl Methacrylate,M-PMMA)后,M-PMMA/rGO复合薄膜的氧透过率(Oxygen Transmission Rate,OTR)较原始rGO降低了49.6%(20.0wt% M-PMMA),显著提高了rGO-SF气压传感器的稳定性与可靠性。试验表明,rGO-SF在内外气压差的作用下会导致其电阻发生变化。基于此原理,通过测量电阻变化,即可实现对气压的精确测量。经测试,该传感器能够检测0~100 kPa范围内的气压变化,尤其在30~100 kPa气压差区间,呈现出良好的线性度(S²=0.99)与灵敏度(1.298×10^-3kPa^-1)。

关键词: 气压传感器, 还原氧化石墨烯, 悬浮膜, 自组装, 复合材料

Abstract: This paper presents the design and fabrication of a pressure sensor based on reduced graphene oxide suspended film (rGO-SF). The rGO-SF was formed through in-situ growth on pre-etched SiO₂ cavities, where self-assembled graphene oxide (GO) films spontaneously separated from solution. Compared with conventional graphene-based pressure sensor fabrication processes, the rGO-SF sensor eliminates membrane transfer steps, significantly simplifying the manufacturing workflow and providing advantages for large-scale production. By introducing modified polymethyl methacrylate (M-PMMA) into the rGO interlayers, the oxygen transmission rate (OTR) of the M-PMMA/rGO composite film was reduced by 49.6% (at 20.0wt% M-PMMA loading), markedly enhancing the stability and reliability of the rGO-SF pressure sensor. Experimental results demonstrate that pressure differences between internal and external environments induce measurable resistance changes in rGO-SF. Leveraging this principle, precise pressure measurement can be achieved by monitoring resistance variations. Testing shows the sensor effectively detects pressure changes in the 0 kPa to 100 kPa range, with excellent linearity (S²=0.99) and sensitivity (1.298×10^-3 kPa^-1) particularly in the 30 kPa to 100 kPa differential pressure regime.

Key words: pressure sensors, reduced graphene oxide, suspended films, self-assembly, composites

中图分类号:

TB332

王垚, 梅启林, 丁国民, 申正鹏, 高琳沁, 王鸿. 基于石墨烯/聚合物自组装悬浮膜气压传感器的制备与性能探究[J]. 复合材料科学与工程, 2026, 0(3): 145-154.

WANG Yao, MEI Qilin, DING Guomin, SHEN Zhengpeng, GAO Linqin, WANG Hong. Preparation and performance study of graphene/polymer self-assembled suspended membrane-based air pressure sensors[J]. COMPOSITES SCIENCE AND ENGINEERING, 2026, 0(3): 145-154.

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